YS

Yutaka Suenaga

NI Nikon: 1 patents #56 of 227Top 25%
Overall (2005): #27,435 of 245,428Top 15%
2
Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6856377 Relay image optical system, and illuminating optical device and exposure system provided with the optical system 2005-02-15
6844919 Projection optical system and exposure apparatus having the projection optical system 2005-01-18