Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916225 | Monitor, method of monitoring, polishing device, and method of manufacturing semiconductor wafer | Yasushi Ohuchi | 2005-07-12 |
| 6894839 | Illumination optical system and laser processor having the same | Miyuki Masaki, Takehito Yagi | 2005-05-17 |