Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958803 | Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics | Toshihiro Sasaya, Kazuo Ushida | 2005-10-25 |
| 6850371 | Optical member and method of producing the same, and projection aligner | Hideki Obara | 2005-02-01 |