Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979369 | Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof | Kazuaki Yamaguchi | 2005-12-27 |
| 6875960 | Heating system | Shinji Yamaguchi, Hisakazu Okajima, Yutaka Unno | 2005-04-05 |