Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919286 | Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members | Yuji Katsuda | 2005-07-19 |
| 6919287 | Aluminum nitride materials and members used for the production of semiconductors | Naomi Teratani, Yuji Katsuda | 2005-07-19 |
| 6884742 | Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members | Yuji Katsuda | 2005-04-26 |