Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864021 | Photomask and pattern forming method used in a thermal flow process and semiconductor integrated circuit fabricated using the thermal flow process | Shinji Ishida, Tsuyoshi Yoshii | 2005-03-08 |
| 6841318 | Levenson phase shift mask and method for forming fine pattern by using the same | — | 2005-01-11 |