Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909998 | In-situ monitoring method and system for mold deformation in nanoimprint | Chin-Chung Nien | 2005-06-21 |
| 6872662 | Method for detecting the endpoint of a chemical mechanical polishing (CMP) process | Yun-Liang Huang | 2005-03-29 |