Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941811 | Method and apparatus for detecting wafer flaw | Chih-Kun Chen, Tun-Yuan Lo | 2005-09-13 |
| 6920796 | Device used for detecting clamping force of processed object and method thereof | Chih-Kun Chen, Chung-Min Lin, Shan-Chang Wang, Jiun-Bo Wang | 2005-07-26 |