Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932094 | Slurry tank autocleaner | Chih-Kun Chen | 2005-08-23 |
| 6886442 | Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same | Wan Wu | 2005-05-03 |
| 6865764 | Fixture for assembling a post-CMP cleaning brush | Chia-Chi Lin | 2005-03-15 |