Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979407 | Process for producing an SPM sensor | — | 2005-12-27 |
| 6958124 | SPM sensor and process for producing it | — | 2005-10-25 |
| 6953751 | Micro device and process for producing it | Manfred Detterbeck, Mathieu Burri, Theo Hartmann, Terunobu Akiyama | 2005-10-11 |