KK

Kazuya Kato

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
Overall (2005): #164,037 of 245,428Top 70%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6878234 Plasma processing device and exhaust ring Masahiro Ogasawara 2005-04-12