Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843264 | Multi-phase pressure control valve for process chamber | Hsueh-Chang Wu, Sunny Wu, Chien-Ling Huang, Chin-Hsin Peng, Mei-Seng Zhou | 2005-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843264 | Multi-phase pressure control valve for process chamber | Hsueh-Chang Wu, Sunny Wu, Chien-Ling Huang, Chin-Hsin Peng, Mei-Seng Zhou | 2005-01-18 |