CC

Chih-Tien Chang

TSMC: 1 patents #198 of 851Top 25%
Overall (2005): #226,392 of 245,428Top 95%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6843264 Multi-phase pressure control valve for process chamber Hsueh-Chang Wu, Sunny Wu, Chien-Ling Huang, Chin-Hsin Peng, Mei-Seng Zhou 2005-01-18