Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939650 | Method of patterning photoresist on a wafer using a transmission mask with a carbon layer | James R. Wasson | 2005-09-06 |
| 6875546 | Method of patterning photoresist on a wafer using an attenuated phase shift mask | James R. Wasson | 2005-04-05 |