Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927011 | Resins for resists and chemically amplifiable resist compositions | Yukiya Wakisaka, Toru Tokimitsu, Naoshi Murata, Yoshihiro Kamon, Hikaru Momose | 2005-08-09 |
| 6887646 | Chemical amplification resist composition | Yukiya Wakisaka, Masayuki Tooyama | 2005-05-03 |
| 6844559 | Apparatus and method for testing substrate | — | 2005-01-18 |