Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881991 | Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof | Satoshi Aoyama, Shouichi Sakamoto, Takaei Sasaki | 2005-04-19 |
| 6844117 | Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof | Takaei Sasaki | 2005-01-18 |