Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958529 | Acceleration sensor and method of manufacture thereof | Makio Horikawa, Mika Okumura | 2005-10-25 |
| 6905905 | Method of manufacturing thin-film structure | Mika Okumura, Makio Horikawa | 2005-06-14 |
| 6900071 | Substrate and method for producing the same, and thin film structure | Mika Okumura, Makio Horikawa | 2005-05-31 |