Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970291 | Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method | — | 2005-11-29 |
| 6951004 | Layout data saving method, layout data converting device and graphic verifying device | — | 2005-09-27 |