Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977804 | Electrostatic chuck support mechanism, support stand device and plasma processing equipment | — | 2005-12-20 |
HY
Hisashi Yanagida
Overall (2005): #187,435 of 245,428Top 80%
1
Patents 2005