Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893332 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2005-05-17 |
| 6860798 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2005-03-01 |