Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972227 | Semiconductor processing methods, and methods of forming a dynamic random access memory (DRAM) storage capacitor | — | 2005-12-06 |
| 6936534 | Method for the post-etch cleaning of multi-level damascene structures having underlying copper metallization | — | 2005-08-30 |
| 6936540 | Method of polishing a semiconductor substrate, post-CMP cleaning process, and method of cleaning residue from registration alignment markings | — | 2005-08-30 |
| 6930017 | Wafer Cleaning method and resulting wafer | Paul A. Morgan | 2005-08-16 |
| 6908569 | Ruthenium silicide wet etch | Brenda D. Kraus | 2005-06-21 |