Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913523 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Judson R. Sharples, Kenneth F. Zacharias | 2005-07-05 |
| 6889698 | Apparatus for selective removal of material from wafer alignment marks | Russell C. Zahorik, Hugh E. Stroupe, Todd A. Dobson, Brian F. Gordon | 2005-05-10 |