Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958092 | Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof | Gregory M. Wilson, Jon Rossi | 2005-10-25 |
| 6878039 | Polishing pad window for a chemical-mechanical polishing tool | John D. Herb, Stephen C. Schultz | 2005-04-12 |