Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6934007 | Method for photolithography using multiple illuminations and a single fine feature mask | Brian Tyrrell | 2005-08-23 |
| 6884551 | Method and system of lithography using masks having gray-tone features | Brian Tyrrell | 2005-04-26 |