Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955961 | Method for defining a minimum pitch in an integrated circuit beyond photolithographic resolution | — | 2005-10-18 |
| 6946400 | Patterning method for fabricating integrated circuit | — | 2005-09-20 |
| 6887627 | Method of fabricating phase shift mask | Chi-Yuan Hung, Ching-Yu Chang, I-Pien Wu | 2005-05-03 |
| 6867116 | Fabrication method of sub-resolution pitch for integrated circuits | — | 2005-03-15 |