Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864141 | Method of incorporating nitrogen into metal silicate based dielectrics by energized nitrogen ion beams | Wai Lo, James Kimball | 2005-03-08 |
| 6864152 | Fabrication of trenches with multiple depths on the same substrate | Mohammad R. Mirbedini, Venkatesh P. Gopinath, Hong Lin, Dodd Defibaugh, Ynhi Le | 2005-03-08 |
| 6849512 | Thin gate dielectric for a CMOS transistor and method of fabrication thereof | Wai Lo, James Kimball | 2005-02-01 |