Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964924 | Integrated circuit process monitoring and metrology system | Peter A. Burke, Eric Jacob Jan Kirchner | 2005-11-15 |
| 6856029 | Process independent alignment marks | David W. Daniel | 2005-02-15 |