Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852243 | Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface | Gregory A. Johnson, Kunal N. Taravade | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852243 | Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface | Gregory A. Johnson, Kunal N. Taravade | 2005-02-08 |