Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897156 | Vacuum plasma processor method | Kenji Takeshita, Tom Choi, Frank Y. Lin | 2005-05-24 |
| 6855567 | Etch endpoint detection | Andrew Lui, Chung-Ho Huang, Weinan Jiang | 2005-02-15 |