Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6907364 | Methods and apparatus for deriving thermal flux data for processing a workpiece | Kameshwar Poolla | 2005-06-14 |
| 6878301 | Methods and apparatuses for trench depth detection and control | — | 2005-04-12 |