Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846726 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Jerome S. Hubacek | 2005-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846726 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Jerome S. Hubacek | 2005-01-25 |