Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936548 | Method for depositing silicon nitride films and silicon oxynitride films by chemical vapor deposition | Christian Dussarrat | 2005-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936548 | Method for depositing silicon nitride films and silicon oxynitride films by chemical vapor deposition | Christian Dussarrat | 2005-08-30 |