Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897140 | Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography | Eric Lavallee, Jacques Beauvais | 2005-05-24 |
| 6855646 | Plasma polymerized electron beam resist | Yousef Awad, Eric Lavallee, Jacques Beauvais | 2005-02-15 |