Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916559 | Ceramic material resistant to halogen plasma and member utilizing the same | Shunichi Murakawa, Yumiko Itoh, Hiroshi Aida, Katsumi Nakamura | 2005-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916559 | Ceramic material resistant to halogen plasma and member utilizing the same | Shunichi Murakawa, Yumiko Itoh, Hiroshi Aida, Katsumi Nakamura | 2005-07-12 |