Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841031 | Substrate processing apparatus equipping with high-pressure processing unit | Tomomi Iwata, Yusuke Muraoka, Kimitsugu Saito, Ikuo Mizobata, Ryuji Kitakado | 2005-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841031 | Substrate processing apparatus equipping with high-pressure processing unit | Tomomi Iwata, Yusuke Muraoka, Kimitsugu Saito, Ikuo Mizobata, Ryuji Kitakado | 2005-01-11 |