Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885461 | Weighted least-square interferometric measurement of multiple surfaces | — | 2005-04-26 |
| 6856405 | Non linear phase shift calibration for interferometric measurement of multiple surfaces | — | 2005-02-15 |
| 6847458 | Method and apparatus for measuring the shape and thickness variation of polished opaque plates | Klaus Freischlad | 2005-01-25 |