Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6928628 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +1 more | 2005-08-09 |
| 6921916 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel | 2005-07-26 |