Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952256 | Optical compensation in high numerical aperture photomask inspection systems for inspecting photomasks through thick pellicles | Ronald L. Roncone | 2005-10-04 |
| 6879390 | Multiple beam inspection apparatus and method | Robert W. Walsh | 2005-04-12 |