Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906395 | Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors | — | 2005-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906395 | Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors | — | 2005-06-14 |