Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855236 | Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus | Michio Sato, Takashi Nakamura | 2005-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855236 | Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus | Michio Sato, Takashi Nakamura | 2005-02-15 |