Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872508 | Exposure method and method of manufacturing semiconductor device | Nobuhiro Komine, Tatsuhiko Higashiki | 2005-03-29 |
| 6842230 | Exposing method | Manabu Takakuwa, Tatsuhiko Higashiki | 2005-01-11 |