Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930757 | Managing method of exposure apparatus, managing method of mask, exposure method, and manufacturing method of semiconductor device | Takashi Sato | 2005-08-16 |
| 6839132 | Aberration measuring method of projection optical system | Takashi Sato | 2005-01-04 |