Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965687 | Size checking method and apparatus | Eiji Sawa | 2005-11-15 |
| 6888958 | Method and apparatus for inspecting patterns | Eiji Sawa, Satoshi Imi | 2005-05-03 |
| 6849363 | Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device | Katsuki Ohashi, Akira Ono, Hiroyuki Ikeda | 2005-02-01 |