Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875325 | Sputtering target producing few particles | Hirohito Miyashita | 2005-04-05 |
| 6858116 | Sputtering target producing few particles, backing plate or sputtering apparatus and sputtering method producing few particles | Yasuhiro Yamakoshi, Hirohito Miyashita | 2005-02-22 |