Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917508 | Apparatus for manufacturing semiconductor device | Joung-Sik Kim | 2005-07-12 |
| 6847516 | Electrostatic chuck for preventing an arc | Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han +1 more | 2005-01-25 |