Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908722 | Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition | Satoshi Ebata, Eiji Yoneda, Tomoki Nagai, Tatsuya Toneri, Yong Wang +1 more | 2005-06-21 |
| 6846895 | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition | Tsutomu Shimokawa, Akihiro Hayashi, Satoru Nishiyama | 2005-01-25 |