Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872258 | Shower head of a wafer treatment apparatus having a gap controller | Jong-Chul Park, Dong Hyun Kim, Hye Jin Jo | 2005-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872258 | Shower head of a wafer treatment apparatus having a gap controller | Jong-Chul Park, Dong Hyun Kim, Hye Jin Jo | 2005-03-29 |