Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921437 | Gas distribution system | Jack Yao | 2005-07-26 |
| 6890386 | Modular injector and exhaust assembly | Richard H. Matthiesen, Samuel Kurita | 2005-05-10 |
| 6859617 | Porous thin film heater and method | Arthur J. Goodsel | 2005-02-22 |