Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975184 | Adjusting the frequency of film bulk acoustic resonators | Michael DiBattista, Seth A. Fortuna, Qing Ma, Valluri Rao | 2005-12-13 |
| 6967548 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2005-11-22 |
| 6949268 | Frequency uniformity of film bulk acoustic resonators | Dong-sik Shim, Qing Ma | 2005-09-27 |
| 6943648 | Methods for forming a frequency bulk acoustic resonator with uniform frequency utilizing multiple trimming layers and structures formed thereby | Jose Maiz, Qing Ma, Valluri Rao | 2005-09-13 |
| 6940367 | Forming film bulk acoustic resonator filters | Qing Ma, Valluri Rao | 2005-09-06 |
| 6924717 | Tapered electrode in an acoustic resonator | Eyal Ginsburg, Alexander Talalyevsky, Eyal Bar-Sadeh, Doron Rubin | 2005-08-02 |
| 6903452 | Packaging microelectromechanical structures | Qing Ma, Valluri Rao, John Heck, Quan Tran | 2005-06-07 |
| 6861783 | Structure to achieve high-Q and low insertion loss film bulk acoustic resonators | Qing Ma, Valluri Rao | 2005-03-01 |