Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881914 | Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs | Reiner Missale, Martin Peiter | 2005-04-19 |
| 6857841 | Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool | — | 2005-02-22 |