Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864175 | Method for fabricating integrated circuit arrangements, and associated circuit arrangements, in particular tunnel contact elements | Manfred Engelhardt | 2005-03-08 |
| 6849365 | Reflection mask for EUV-lithography and method for fabricating the reflection mask | Siegfried Schwarzl | 2005-02-01 |